

2025年3月25日集成电路科学技术大会(CSTIC) 2025在上海顺利举行。


CSTIC 2025 will be held on March 24-25, 2025 in Shanghai, China, in conjunction with SEMICON China 2025. The conference will have ten symposiums covering all aspects of semiconductor technology with focus on manufacturing and advanced technology, including detailed manufacturing processes, device design, integration, materials, and equipment, as well as emerging semiconductor technologies, circuit design, and silicon material applications. Hot topics, such as artificial intelligence (AI) chips, 6G chips, neuromorphic computing technology, advanced memory technology, 3D integration, MEMS technology will also be addressed in the conference.


在会议期间,卫利国际科贸(上海)有限公司携《Monitoring & Testing of Nanoparticle Contaminants 》报告进行精彩演示。

卫利集团聚焦颗粒微污染管控和静电防护,结合业界“光散射原理”、“凝结核原理”、“视觉/动态图像侦测”等测试原理和方法积极参与到颗粒和Precursor测试的检测中,为
Hygrid Analysis提供更有利的测试方法和仪器,带来更加耳目一新的“眼睛”。
1. 湿化学品的Native Particle和Particle Precursor测试,可以对小到3nm的size测试,更还可对“硫酸”和“盐酸”样品完成9nm的颗粒测试;
2. 对于光阻液和PGME/PGMEA也可通过“视觉/动态图像法”实时测试并提供“影像、颗粒粒径和数量浓度”等信息;3. 对于清洗后或接触湿法工艺后的产品表面会因残留微小气泡干燥后造成各种颗粒不良,那对于液体中的气泡可通过“视觉/动态图像法”实时测试并提供“影像、气泡数量以及污染物的分类”等信息。

感谢各位客户对我们的支持与信任,期待与您再次相遇!






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