○ Used by Fab, PVD / CVD and RTP departments of semiconductor manufacturers
○ Provide wafers of different sizes and materials
○ The number of sensors can be customized
○ Excellent software function, can display the temperature distribution status with graphics and colors
○ Data can be stored in .csv format
○ When measuring the temperature for a long time, it can provide the heating curve graph of each measurement point
○ Used by Fab, PVD / CVD and RTP departments of semiconductor manufacturers
○ Provide wafers of different sizes and materials
○ The number of sensors can be customized
○ Excellent software function, can display the temperature distribution status with graphics and colors
○ Data can be stored in .csv format
○ When measuring the temperature for a long time, it can provide the heating curve graph of each measurement point
|
|
PFK TC Wafer |
|---|---|
| Wafer size & type | 2,3,4,5,6,8,12 inch / Flat, Notch |
| Number of TC | 1 - 34 points (12 inch) |
| T/C mounting | Front, Back |
| T/C type | K, R, S others() |
| Total length |
|
| Wire thickness | 0.127mm, 0.075mm (RTP recommend) |
| 1st length |
|
| 1st Insulation | Polyimide with teflon , Silica sleeve, Quaryz microtube (RTP recommend), None, Other() |
| 2nd length Feed through |
|
| 3rd length |
|
| 3rd Insulation | Polyimide with teflon , Silica sleeve, Quaryz microtube, None, Other() |
| Connector type | Mini connector 2pin, U-shape terminal D-sub multiconnector, others() |
| Process temperature |
|
| Application | CVD, PVD, RTP, Photo, others() |
| Instrument | DAQ system (Data Acquisition system), Software(The-Map by PFK), others(), None() |
